Cleanroom General Info
From OptoelectronicsWiki
Contents
Training[edit]
Each user is responsible for their own glassware. A list of glassware new users should purchase, along with part numbers and approximate costs, can be found here (Excel file): New user shopping list
Safety[edit]
Links[edit]
Things Whut Be Etchin' Other Things[edit]
Silicon[edit]
- CF4 plasma
- KOH
Germanium[edit]
- All fluorinated plasmas
- Piranha (H2SO4+H2O2, any concentration)
- SC1 (NH4OH+H2O2, any concentration)
- Heated H2O2
- KI (Au etchant)
