ECE Teaching Cleanroom
Embark on a journey of innovation with our cutting-edge Teaching Semiconductor Cleanroom (TCR). In the TCR students will fabricate and characterize semiconductor devices such as MOSCAPs, MOSFETS, High Electron Mobility Transistors, MEMS microfluidic devices and GaN LEDs.
This facility is utilized by the ECE, MAT and ME departments for microfabrication courses such as ECE120A, ECE220A / MAT215A, ECE220B / MAT215B, ME141. For academic users, taking at least one introductory course (ECE 120A/220A) is a prerequisite for working in the Nanofab.
Facility Info
Hours: Open Mon – Fri from 9:00 am to 6:00 pm
Location: Engineering II, Rm 1141
Phone: (805) 893-4142
Access: Prior authorization required for keycard access
Important
The TCR is for teaching and training-related activities only. State rules do not permit research activities at this facility. Please contact the UCSB Nanofab for research activities.
Coming soon!
- Intense short-term summer training program and training sessions to qualify Nanofab users (year-round)
Contacts
Prashant Srinivasan, Facility Manager – prashant@ucsb.edu
Christopher Wimmel, Building Manager – christopherwimmel@ucsb.edu
Student Research Experience
We are always looking for student interns with the following skills: CAD Design (Solidworks, NX etc), Web-design (Wiki maintenance), electronics (Microcontrollers, FPGAs) and machining experience.
ME/ECE/CE capstone students, please reach out for a range of exciting projects!
Tools and Instrumentation
- Standard Solvent cleaning benches (IPA, Acetone, DI) – 2
- Photoresist spin coaters and HMDS pre-deposition benches – 2
- Developer benches – 2
- Dehydration Ovens – 2
- Hot plates – 4
- Acid benches – 2 (Piranha/Other + HF)
- Oxide growth furnace (MRL 906HT)
- Phosphorous deposition furnace (Thermofisher Lindberg BlueM)
- Electron beam deposition – 2 (Temescal TLab)
- Plasma Asher – 1
- Annealing station – 1
- Electrical characterization stations – 3 (based on HP4145B/4280A)
- Contact Mask Aligner (Karl Suss MJB3) – 2
- Profilometers – 2 (KLA Alphastep D)
- Thin Film analyzer – 1 (Filmetrics F20)
- Ellipsometers – 2 (Rudolph AutoEL, Applied Materials/ J.A. Wollam)
- Microscopes – 4 (Zeiss Axioscope)
Courses Offered
Instructional Microfabrication Laboratory
Electronics, Optoelectronics, Microfluids, Microelectromechanical Systems (MEMS)
We prepare students for a foray into the world of microchip fabrication and beyond, with comprehensive hands-on training in an advanced semiconductor cleanroom dedicated for instructional use only.
All our students are trained in industry standard practices such as maintaining detailed process travelers, design for manufacturing, fabrication tolerance, tool calibration and passdown protocols.
- Electrical Engineering | Material Science (# 1, 2, 3)
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Electrical Engineering | Material Science
- Electronic device fabrication: The 1xx series are undergraduate and 2xx are graduate level classes. Students first learn how to safely work in a cleanroom environment, then advance to fabricating metal-oxide semiconductor (MOS) devices with contact Photolithography. Mask plates (device imprints) are provided to the students. This adventure culminates with electrical testing and characterization.
- Advanced fabrication: Builds on the 1xx/2xx series of classes.
120B - Lab to Fab: Hands on application of VLSI design principles. Based on the experience from the previous class, students first propose a device (ex: Half-Adder, N-bit counter, Transistor demodulator), simulate it in SPICE, then layout lithography masks in LEdit/KLayout, send the masks out for fabrication, make their microchip device in the cleanroom, fully characterize it and report their findings. This is a cool class!
220B/215B - Beyond Silicon: High Electron Mobility device fabrication. Students move beyond Silicon and fabricate and characterize multi-stack GaAs devices.
- Optoelectronic device fabrication: Builds on the 1xx/2xx series of classes.
220C: Students enter the exciting world of fabricating light emitting devices based on GaN substrates.
- Electronic device fabrication: The 1xx series are undergraduate and 2xx are graduate level classes. Students first learn how to safely work in a cleanroom environment, then advance to fabricating metal-oxide semiconductor (MOS) devices with contact Photolithography. Mask plates (device imprints) are provided to the students. This adventure culminates with electrical testing and characterization.
- Mechanical Engineering (# 4)
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Mechanical Engineering
4. Microfluidics/MEMS fabrication: The 1xx series are undergraduate and 2xx are graduate level classes. Students first learn how to safely work in a cleanroom environment, then advance to fabricating micromechanical devices such as microfluidic pumps and sensors with contact Photolithography and finally characterize their devices by optical and electrical techniques.
- Training Programs (# 5)
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Training Programs
5. Accelerated Training Programs: Typically 1 - 2 week long summer programs ranging from bootcamps for new entrants to semiconductor fabrication and advanced training for working professionals. New courses are continuously being developed. Tracks include the technician training program, upskilling for engineers and students/researcher bootcamps for internal users.
You do not have to be a UCSB student to enroll in these programs. Offered in partnership with PaCE, UCSB Nanofab and the CNSI. Please contact us directly for your needs.
Safety
- The ECE Electronics Shop maintains safety training records. Safety training is required for anyone wanting access to a lab
- Environmental health and safety offers safety training classes at their facility that occur every quarter, however due to COVID-19 live classes are currently not available. Please visit the UC Learning Center to sign up for the online Safety Training courses.
Learn more about Required Safety Training and Reporting Lab Safety Issues on the ECE Electronics Shop webpage
